|
TG900MU
|
TG1300MU
|
Inlet flange
|
CF160
|
CF200
|
Volume flow rate
|
N2 (L/s)
|
900
|
1300
|
N2 (with protective
screen) (L/s)
|
860
|
1230
|
H2 (L/s)
|
1050
|
1200
|
Max. compression ratio
|
N2
|
1×108
|
H2
|
6.0×104
|
Base pressure
|
(Pa/Torr)
|
< 1×10-8/< 7.5×10-11
|
Max. throughput※1
|
N2(sccm)
|
3000
|
Startup time (min)
|
4-5
|
Shutdown time (min)
|
4-5
|
Max. backing pressure
|
(Pa/Torr)
|
500/3.8
|
Recommended backing vacuum
pump (L/min)
|
≧250
|
Weight (kg)
|
42
|
Controller
|
TC010MA
|
-
*1 ： 1000L/min的**真空泵。
-
*2 ： 尺寸与标准尺寸相同。
联系人：李先生 13402684488（微信同号）
罗茨真空泵、油封旋转真空泵、液环真空泵、油扩散泵、喷射器、干式真空泵、真空系统、真空设备